Varian Dry Scroll Pumps

IDP-3 Dry Scroll Pump (60 liters/min).

The Varian IDP-3 Dry Scroll Pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is the smallest scroll pump made for general vacuum applications, which makes it easy to integrate into OEM systems, and it weighs only 21 pounds (9.5 kg). Yet with a pumping speed of 60 liters/min. and a very low base pressure of 250 millitorr, it is the highest-performing dry pump in its class.

Features

  • Oil-free, for no contamination of the vacuum system
  • Hermetic design with fully isolated motor and bearings
  • Small size: 14 × 7 × 6 inches (351 × 181 × 140 mm)
  • Lower base pressure than diaphragm pumps
  • No mechanisms subject to catastrophic failure
  • Low noise and vibration
Download Brochure (idp3-brochure.pdf - 2.6MB)

SH-110 Dry Scroll Pump (110 liters/min).

The Varian SH-110 is a dry, hermetic scroll pump that provides industry-leading features designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump produces a pumping speed of 110 L/m (on 60 Hz power) and achieves an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is also ideally suited to end-user applications.

The SH-110 pump conforms with CE, CSA, and Semi S2-0200 requirements.

Features
  • Low-temperature operation
  • ¼-horsepower motor for low power consumption
  • Built-in exhaust valve for low noise production
  • Moveable exhaust port for flexibility in tight spaces
  • High pumping speed at high pressure allows fast pumpdown
  • Low weight with convenient carrying handle
  • Built-in fail-safe isolation valve protects the vacuum system
  • Universal 100-230 VAC power for easy installation worldwide
  • Automatic air ballast for effective handling of moisture
  • Quick tip-seal replacement for low cost of ownership
  Download Brochure (Scroll_brochure.pdf 625 KB)

TriScroll 300 Pump (250 liters/min).


TriScroll dry primary pumps are multi-stage dry vacuum pumps designed and manufactured by Varian for high reliability. The TriScroll pumps produce oil-free vacuum at high speed and low ultimate pressure.

The unique, patented TriScroll features proven reliability and durability, leading to superior cost of ownership and consistent performance.

Features

  • Unique TriScroll™ design
  • Bearing purge port
  • Proven reliability
  • Automatic ballast port

Download Brochure (Scroll_brochure.pdf 625 KB)

TriScroll 600 Pump (500 liters/min).


TriScroll dry primary pumps are multi-stage dry vacuum pumps designed and manufactured by Varian for high reliability. The TriScroll pumps produce oil-free vacuum at high speed and low ultimate pressure.

The unique patented TriScroll features provide proven reliability and durability leading to superior cost of ownership and consistent performance.

Features

  • Unique TriScroll™ design
  • Bearing purge port
  • Proven reliability
  • Automatic ballast port

Download Brochure (Scroll_brochure.pdf 625 KB)