IDP-3 Dry Scroll Pump (60 liters/min).
The Varian IDP-3 Dry Scroll Pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is the smallest scroll pump made for general vacuum applications, which makes it easy to integrate into OEM systems, and it weighs only 21 pounds (9.5 kg). Yet with a pumping speed of 60 liters/min. and a very low base pressure of 250 millitorr, it is the highest-performing dry pump in its class.Features
- Oil-free, for no contamination of the vacuum system
- Hermetic design with fully isolated motor and bearings
- Small size: 14 × 7 × 6 inches (351 × 181 × 140 mm)
- Lower base pressure than diaphragm pumps
- No mechanisms subject to catastrophic failure
- Low noise and vibration